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High responsivity, low dark current, heterogeneously integrated thin film Si photodetectors on rigid and flexible substrates.

Publication ,  Journal Article
Dhar, S; Miller, DM; Jokerst, NM
Published in: Optics express
March 2014

We report thin film single crystal silicon photodetectors (PDs), composed of 13- 25 μm thick silicon, heterogeneously bonded to transparent Pyrex® and flexible Kapton® substrates. The measured responsivity and dark current density of the PDs on pyrex is 0.19 A/W - 0.34 A/W (λ = 470 nm - 600 nm) and 0.63 nA/cm(2), respectively, at ~0V bias. The measured responsivity and dark current density of the flexible PDs is 0.16 A/W - 0.26 A/W (λ = 470 nm - 600 nm) and 0.42 nA/cm(2), respectively, at a ~0V bias. The resulting responsivity-to-dark current density ratios for the reported rigid and flexible PDs are 0.3-0.54 cm(2)/nW and 0.38-0.62 cm(2)/nW, respectively. These are the highest reported responsivity-to-dark current density ratios for heterogeneously bonded thin film single crystal Si PDs, to the best of our knowledge. These PDs are customized for applications in biomedical imaging and integrated biochemical sensing.

Duke Scholars

Published In

Optics express

DOI

EISSN

1094-4087

ISSN

1094-4087

Publication Date

March 2014

Volume

22

Issue

5

Start / End Page

5052 / 5059

Related Subject Headings

  • Spectrum Analysis
  • Silicon
  • Optics
  • Optical Phenomena
  • Optical Devices
  • Humans
  • Equipment Design
  • Diagnostic Imaging
  • Biomedical Engineering
  • 5102 Atomic, molecular and optical physics
 

Citation

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Dhar, S., Miller, D. M., & Jokerst, N. M. (2014). High responsivity, low dark current, heterogeneously integrated thin film Si photodetectors on rigid and flexible substrates. Optics Express, 22(5), 5052–5059. https://doi.org/10.1364/oe.22.005052
Dhar, Sulochana, David M. Miller, and Nan M. Jokerst. “High responsivity, low dark current, heterogeneously integrated thin film Si photodetectors on rigid and flexible substrates.Optics Express 22, no. 5 (March 2014): 5052–59. https://doi.org/10.1364/oe.22.005052.
Dhar, Sulochana, et al. “High responsivity, low dark current, heterogeneously integrated thin film Si photodetectors on rigid and flexible substrates.Optics Express, vol. 22, no. 5, Mar. 2014, pp. 5052–59. Epmc, doi:10.1364/oe.22.005052.
Journal cover image

Published In

Optics express

DOI

EISSN

1094-4087

ISSN

1094-4087

Publication Date

March 2014

Volume

22

Issue

5

Start / End Page

5052 / 5059

Related Subject Headings

  • Spectrum Analysis
  • Silicon
  • Optics
  • Optical Phenomena
  • Optical Devices
  • Humans
  • Equipment Design
  • Diagnostic Imaging
  • Biomedical Engineering
  • 5102 Atomic, molecular and optical physics