Vertical single- and double-walled carbon nanotubes grown from modified porous anodic alumina templates

Published

Journal Article

Vertical single-walled and double-walled carbon nanotube (SWNT and DWNT) arrays have been grown using a catalyst embedded within the pore walls of a porous anodic alumina (PAA) template. The initial film structure consisted of a SiOx adhesion layer, a Ti layer, a bottom Al layer, a Fe layer, and a top Al layer deposited on a Si wafer. The Al and Fe layers were subsequently anodized to create a vertically oriented pore structure through the film stack. CNTs were synthesized from the catalyst layer by plasma-enhanced chemical vapour deposition (PECVD). The resulting structure is expected to form the basis for development of vertically oriented CNT-based electronics and sensors. © IOP Publishing Ltd.

Full Text

Duke Authors

Cited Authors

  • Maschmann, MR; Franklin, AD; Amama, PB; Zakharov, DN; Stach, EA; Sands, TD; Fisher, TS

Published Date

  • August 14, 2006

Published In

Volume / Issue

  • 17 / 15

Start / End Page

  • 3925 - 3929

Electronic International Standard Serial Number (EISSN)

  • 1361-6528

International Standard Serial Number (ISSN)

  • 0957-4484

Digital Object Identifier (DOI)

  • 10.1088/0957-4484/17/15/052

Citation Source

  • Scopus