Solution-based processing of the phase-change material KSb 5S8


Journal Article

A hydrazine-based process for solution-depositing phase-change materials (PCMs) is demonstrated, using KSb5S8 (KSS) as an example. The process involves dissolving the elemental metals and chalcogen in hydrazine at room temperature and spin-coating the solution onto a substrate, followed by a short low-temperature (T ≤ 250°C) anneal. The spin-coated KSS films, which range in thickness from 10 to 90 nm, are examined using variable temperature X-ray diffraction, medium energy ion scattering (MEIS), Rutherford backscattering spectroscopy (RBS), and scanning electron microscopy (SEM). The spin-coated KSS films exhibit a reversible amorphous-crystalline transition with a relatively high crystallization temperature (∼280°C). Selected other chalcogenide-based PCMs are also expected to be suitable for thin-film deposition using this approach. © 2006 American Chemical Society.

Full Text

Duke Authors

Cited Authors

  • Mitzi, DB; Raoux, S; Schrott, AG; Copel, M; Kellock, A; Jordan-Sweet, J

Published Date

  • December 26, 2006

Published In

Volume / Issue

  • 18 / 26

Start / End Page

  • 6278 - 6282

International Standard Serial Number (ISSN)

  • 0897-4756

Digital Object Identifier (DOI)

  • 10.1021/cm0619510

Citation Source

  • Scopus