Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies

Journal Article

A possible path for fabricating three-dimensional metamaterials with curved geometries at optical and infrared frequencies is to stack flexible metamaterial layers. We have fabricated highly uniform metamaterials at terahertz frequencies on large-area, low-stress, free-standing 1 μm thick silicon nitride membranes. Their response remains comparable to that of similar structures on thick substrates as measured by the quality factor of the resonances. Transmission measurements with a Fourier transform infrared spectrometer highlight the advantage of fabricating high frequency metamaterials on thin membranes as etalon effects are eliminated. Releasing the membranes enables layering schemes and placement onto curved surfaces in order to create three-dimensional structures. © 2009 American Institute of Physics.

Full Text

Duke Authors

Cited Authors

  • Peralta, XG; Wanke, MC; Arrington, CL; Williams, JD; Brener, I; Strikwerda, A; Averitt, RD; Padilla, WJ; Smirnova, E; Taylor, AJ; O'Hara, JF

Published Date

  • May 6, 2009

Published In

Volume / Issue

  • 94 / 16

International Standard Serial Number (ISSN)

  • 0003-6951

Digital Object Identifier (DOI)

  • 10.1063/1.3114416

Citation Source

  • Scopus