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Nanogap-enhanced infrared spectroscopy with template-stripped wafer-scale arrays of buried plasmonic cavities.

Publication ,  Journal Article
Chen, X; Ciracì, C; Smith, DR; Oh, S-H
Published in: Nano letters
January 2015

We have combined atomic layer lithography and template stripping to produce a new class of substrates for surface-enhanced infrared absorption (SEIRA) spectroscopy. Our structure consists of a buried and U-shaped metal-insulator-metal waveguide whose folded vertical arms efficiently couple normally incident light. The insulator is formed by atomic layer deposition (ALD) of Al2O3 and precisely defines the gap size. The buried nanocavities are protected from contamination by a silicon template until ready for use and exposed by template stripping on demand. The exposed nanocavity generates strong infrared resonances, tightly confines infrared radiation into a gap that is as small as 3 nm (λ/3300), and creates a dense array of millimeter-long hotspots. After partial removal of the insulators, the gaps are backfilled with benzenethiol molecules, generating distinct Fano resonances due to strong coupling with gap plasmons, and a SEIRA enhancement factor of 10(5) is observed for a 3 nm gap. Because of the wafer-scale manufacturability, single-digit-nanometer control of the gap size via ALD, and long-term storage enabled by template stripping, our buried plasmonic nanocavity substrates will benefit broad applications in sensing and spectroscopy.

Duke Scholars

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Published In

Nano letters

DOI

EISSN

1530-6992

ISSN

1530-6984

Publication Date

January 2015

Volume

15

Issue

1

Start / End Page

107 / 113

Related Subject Headings

  • Nanoscience & Nanotechnology
 

Citation

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Chen, X., Ciracì, C., Smith, D. R., & Oh, S.-H. (2015). Nanogap-enhanced infrared spectroscopy with template-stripped wafer-scale arrays of buried plasmonic cavities. Nano Letters, 15(1), 107–113. https://doi.org/10.1021/nl503126s
Chen, Xiaoshu, Cristian Ciracì, David R. Smith, and Sang-Hyun Oh. “Nanogap-enhanced infrared spectroscopy with template-stripped wafer-scale arrays of buried plasmonic cavities.Nano Letters 15, no. 1 (January 2015): 107–13. https://doi.org/10.1021/nl503126s.
Chen X, Ciracì C, Smith DR, Oh S-H. Nanogap-enhanced infrared spectroscopy with template-stripped wafer-scale arrays of buried plasmonic cavities. Nano letters. 2015 Jan;15(1):107–13.
Chen, Xiaoshu, et al. “Nanogap-enhanced infrared spectroscopy with template-stripped wafer-scale arrays of buried plasmonic cavities.Nano Letters, vol. 15, no. 1, Jan. 2015, pp. 107–13. Epmc, doi:10.1021/nl503126s.
Chen X, Ciracì C, Smith DR, Oh S-H. Nanogap-enhanced infrared spectroscopy with template-stripped wafer-scale arrays of buried plasmonic cavities. Nano letters. 2015 Jan;15(1):107–113.
Journal cover image

Published In

Nano letters

DOI

EISSN

1530-6992

ISSN

1530-6984

Publication Date

January 2015

Volume

15

Issue

1

Start / End Page

107 / 113

Related Subject Headings

  • Nanoscience & Nanotechnology