Photopatterning of thiol-ene-acrylate copolymers

Journal Article (Journal Article)

Thiol-ene-acrylate copolymers exhibit a unique blend of characteristics which make them suitable for both photolithographic patterning and material property tuning. Five thiol-ene-acrylate monomer blends are found to exhibit similar reaction rates via photo-differential scanning calorimetry, while dynamic mechanical analysis shows the trend in the thermomechanical properties of three of the systems. Two selected thiol-ene-acrylate systems showed rapid polymerization with low apparent shrinkage and relatively low heat evolution (when compared to acrylates) with excellent patternability, while a binary acrylate system shows extreme apparent shrinkage, greater heat evolution, and does not replicate the mask pattern in a controllable fashion. The apparent shrinkage is a measure of patternability, since this quantity represents the actual polymer dimensions when compared to the desired dimension (i.e., photomask pattern). © 1992-2012 IEEE.

Full Text

Duke Authors

Cited Authors

  • Kasprzak, SE; Wester, BA; Raj, T; Allen, M; Gall, K

Published Date

  • January 1, 2013

Published In

Volume / Issue

  • 22 / 2

Start / End Page

  • 339 - 348

International Standard Serial Number (ISSN)

  • 1057-7157

Digital Object Identifier (DOI)

  • 10.1109/JMEMS.2012.2226927

Citation Source

  • Scopus