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Suppression of inelastic deformation of nanocoated thin film microstructures

Publication ,  Journal Article
Zhang, Y; Dunn, ML; Gall, K; Elam, JW; George, SM
Published in: Journal of Applied Physics
June 15, 2004

A study of the suppression of inelastic deformation in multilayer thin film microstructures by alumina nanocoatings was carried out. It was found that while the 40-nm-thick coating had a small effect on the thermoelastic response of the microstructure, it significantly reduced the extent of inelastic deformation during the isothermal hold. The curvature evolution with time was modeled using the assumption that the inelastic deformation mechanism can be described by a power law, ε=Aσ n, and that the polysilicon and alumina deform elastically. For the uncoated microstructures the model described the observed behavior reasonably well, but, for the coated microstructures, the model predicted a decrease in the inelastic deformation.

Duke Scholars

Published In

Journal of Applied Physics

DOI

ISSN

0021-8979

Publication Date

June 15, 2004

Volume

95

Issue

12

Start / End Page

8216 / 8225

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 49 Mathematical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences
  • 01 Mathematical Sciences
 

Citation

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Zhang, Y., Dunn, M. L., Gall, K., Elam, J. W., & George, S. M. (2004). Suppression of inelastic deformation of nanocoated thin film microstructures. Journal of Applied Physics, 95(12), 8216–8225. https://doi.org/10.1063/1.1736329
Zhang, Y., M. L. Dunn, K. Gall, J. W. Elam, and S. M. George. “Suppression of inelastic deformation of nanocoated thin film microstructures.” Journal of Applied Physics 95, no. 12 (June 15, 2004): 8216–25. https://doi.org/10.1063/1.1736329.
Zhang Y, Dunn ML, Gall K, Elam JW, George SM. Suppression of inelastic deformation of nanocoated thin film microstructures. Journal of Applied Physics. 2004 Jun 15;95(12):8216–25.
Zhang, Y., et al. “Suppression of inelastic deformation of nanocoated thin film microstructures.” Journal of Applied Physics, vol. 95, no. 12, June 2004, pp. 8216–25. Scopus, doi:10.1063/1.1736329.
Zhang Y, Dunn ML, Gall K, Elam JW, George SM. Suppression of inelastic deformation of nanocoated thin film microstructures. Journal of Applied Physics. 2004 Jun 15;95(12):8216–8225.
Journal cover image

Published In

Journal of Applied Physics

DOI

ISSN

0021-8979

Publication Date

June 15, 2004

Volume

95

Issue

12

Start / End Page

8216 / 8225

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 49 Mathematical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences
  • 01 Mathematical Sciences