Galvanic corrosion of miniaturized polysilicon structures morphological, electrical, and mechanical effects
The morphological, electrical, and mechanical effects generated by the galvanic corrosion of polysilicon immersed in a standard aqueous HF solution are described. Micromachined test structures consisting of phosphorus-doped polysilicon in contact with a gold metallization layer are examined. Corroded test structures demonstrate a heterogeneous cracking or porosity across the polysilicon surface, a greatly increased electrical resistance, and a decrease in the characteristic frequency of mechanical resonators. This first systematic study demonstrates the impact of corrosion on miniaturized structures, indicating a potential impact upon the material properties, design, performance, fatigue, tribology (friction/ wear), and manufacture of micro- and nanoscale devices. © 2005 The Electrochemical Society. All rights reserved.
Miller, DC; Gall, K; Stoldt, CR
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