A versatile microelectromechanical system for nanomechanical testing
Publication
, Journal Article
Pant, B; Allen, BL; Zhu, T; Gall, K; Pierron, ON
Published in: Applied Physics Letters
January 31, 2011
This letter presents a microelectromechanical system (MEMS) material testing setup that relies on electronic measurements of nanospecimen elongation. Compared to previously demonstrated MEMS that rely on high magnification images to measure elongation, this MEMS is more versatile, allowing both in situ and ex situ testing of nanomaterials with high accuracy and precision. We describe and characterize the MEMS device and illustrate its mode of operation with a successful ex situ uniaxial tensile test of a nanocrystalline nickel nanobeam. The combination of ex situ and in situ nanomechanical tests will enable a thorough investigation of critical properties pertaining to the reliability of nanosystems. © 2011 American Institute of Physics.
Duke Scholars
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
January 31, 2011
Volume
98
Issue
5
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Pant, B., Allen, B. L., Zhu, T., Gall, K., & Pierron, O. N. (2011). A versatile microelectromechanical system for nanomechanical testing. Applied Physics Letters, 98(5). https://doi.org/10.1063/1.3553195
Pant, B., B. L. Allen, T. Zhu, K. Gall, and O. N. Pierron. “A versatile microelectromechanical system for nanomechanical testing.” Applied Physics Letters 98, no. 5 (January 31, 2011). https://doi.org/10.1063/1.3553195.
Pant B, Allen BL, Zhu T, Gall K, Pierron ON. A versatile microelectromechanical system for nanomechanical testing. Applied Physics Letters. 2011 Jan 31;98(5).
Pant, B., et al. “A versatile microelectromechanical system for nanomechanical testing.” Applied Physics Letters, vol. 98, no. 5, Jan. 2011. Scopus, doi:10.1063/1.3553195.
Pant B, Allen BL, Zhu T, Gall K, Pierron ON. A versatile microelectromechanical system for nanomechanical testing. Applied Physics Letters. 2011 Jan 31;98(5).
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
January 31, 2011
Volume
98
Issue
5
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences