A versatile microelectromechanical system for nanomechanical testing

Journal Article (Journal Article)

This letter presents a microelectromechanical system (MEMS) material testing setup that relies on electronic measurements of nanospecimen elongation. Compared to previously demonstrated MEMS that rely on high magnification images to measure elongation, this MEMS is more versatile, allowing both in situ and ex situ testing of nanomaterials with high accuracy and precision. We describe and characterize the MEMS device and illustrate its mode of operation with a successful ex situ uniaxial tensile test of a nanocrystalline nickel nanobeam. The combination of ex situ and in situ nanomechanical tests will enable a thorough investigation of critical properties pertaining to the reliability of nanosystems. © 2011 American Institute of Physics.

Full Text

Duke Authors

Cited Authors

  • Pant, B; Allen, BL; Zhu, T; Gall, K; Pierron, ON

Published Date

  • January 31, 2011

Published In

Volume / Issue

  • 98 / 5

International Standard Serial Number (ISSN)

  • 0003-6951

Digital Object Identifier (DOI)

  • 10.1063/1.3553195

Citation Source

  • Scopus