Thermomechanical behavior and reliability of Au/Si MEMS structures
Publication
, Conference
Miller, D; Herrmann, C; Spark, K; Finch, D; George, S; Stoldt, C; Gall, K
Published in: IEEE International Reliability Physics Symposium Proceedings
January 1, 2004
Our work with micromechanical structures investigates the magnitude and physics of inelastic behavior at various thermomechanical-loading conditions. We also seek to achieve greater mechanical stability, for example using nanometer-thick atomic-layer deposition (ALD) coatings.
Duke Scholars
Published In
IEEE International Reliability Physics Symposium Proceedings
DOI
ISSN
1541-7026
Publication Date
January 1, 2004
Volume
2004-January
Issue
January
Start / End Page
633 / 634
Citation
APA
Chicago
ICMJE
MLA
NLM
Miller, D., Herrmann, C., Spark, K., Finch, D., George, S., Stoldt, C., & Gall, K. (2004). Thermomechanical behavior and reliability of Au/Si MEMS structures. In IEEE International Reliability Physics Symposium Proceedings (Vol. 2004-January, pp. 633–634). https://doi.org/10.1109/RELPHY.2004.1315425
Miller, D., C. Herrmann, K. Spark, D. Finch, S. George, C. Stoldt, and K. Gall. “Thermomechanical behavior and reliability of Au/Si MEMS structures.” In IEEE International Reliability Physics Symposium Proceedings, 2004-January:633–34, 2004. https://doi.org/10.1109/RELPHY.2004.1315425.
Miller D, Herrmann C, Spark K, Finch D, George S, Stoldt C, et al. Thermomechanical behavior and reliability of Au/Si MEMS structures. In: IEEE International Reliability Physics Symposium Proceedings. 2004. p. 633–4.
Miller, D., et al. “Thermomechanical behavior and reliability of Au/Si MEMS structures.” IEEE International Reliability Physics Symposium Proceedings, vol. 2004-January, no. January, 2004, pp. 633–34. Scopus, doi:10.1109/RELPHY.2004.1315425.
Miller D, Herrmann C, Spark K, Finch D, George S, Stoldt C, Gall K. Thermomechanical behavior and reliability of Au/Si MEMS structures. IEEE International Reliability Physics Symposium Proceedings. 2004. p. 633–634.
Published In
IEEE International Reliability Physics Symposium Proceedings
DOI
ISSN
1541-7026
Publication Date
January 1, 2004
Volume
2004-January
Issue
January
Start / End Page
633 / 634