Effect of Al2O3ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures

Published

Conference Paper

The effect of Al203atomic layer deposition (ALD) nanocoatings on the thermo-mechanical behavior of Au/Si microelectromechanical systems (MEMS) structures was discussed. The gold/polysilicon (Au/Si) beam structures were fabricated using the commercially available multi-user MEMS process. It was found that the first thermal cycle of an Au/Si cantilever beam with comparable film thicknesses showed significant nonlinearity and inelasticity in curvature-temperature space.

Duke Authors

Cited Authors

  • Gall, K; Dunn, ML; Hulse, M; Finch, D; George, SM

Published Date

  • July 21, 2003

Published In

Start / End Page

  • 463 - 472

International Standard Serial Number (ISSN)

  • 0099-9512

Citation Source

  • Scopus