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Mems and metamaterial-based terahertz detector

Publication ,  Journal Article
Tao, H; Kadlec, EA; Strikwerda, AC; Fan, K; Padilla, WJ; Averitt, RD; Shaner, EA; Zhang, X
Published in: Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
January 1, 2012

We have designed, fabricated and characterized metamaterials-based far-infrared detector. The detector design, which combines metamaterials (MMs) and MEMS, is frequency selective. The enhanced absorption on the cantilever pixels from split-ring resonators (SRRs) leads to a mechanical deflection which is directly detected with a He-Ne beam. As a demonstration of our first-generation devices, we have fabricated and tested detectors at 95 GHz and 693 GHz with noise equivalent powers (NEP) of 10-8 W/Hz1/2 and single-pixel responsivity as high as 16,500 V/W in a room-temperature and pressure environment.

Duke Scholars

Published In

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

DOI

Publication Date

January 1, 2012

Start / End Page

320 / 323
 

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Tao, H., Kadlec, E. A., Strikwerda, A. C., Fan, K., Padilla, W. J., Averitt, R. D., … Zhang, X. (2012). Mems and metamaterial-based terahertz detector. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, 320–323. https://doi.org/10.31438/trf.hh2012.85
Tao, H., E. A. Kadlec, A. C. Strikwerda, K. Fan, W. J. Padilla, R. D. Averitt, E. A. Shaner, and X. Zhang. “Mems and metamaterial-based terahertz detector.” Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, January 1, 2012, 320–23. https://doi.org/10.31438/trf.hh2012.85.
Tao H, Kadlec EA, Strikwerda AC, Fan K, Padilla WJ, Averitt RD, et al. Mems and metamaterial-based terahertz detector. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 2012 Jan 1;320–3.
Tao, H., et al. “Mems and metamaterial-based terahertz detector.” Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Jan. 2012, pp. 320–23. Scopus, doi:10.31438/trf.hh2012.85.
Tao H, Kadlec EA, Strikwerda AC, Fan K, Padilla WJ, Averitt RD, Shaner EA, Zhang X. Mems and metamaterial-based terahertz detector. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 2012 Jan 1;320–323.

Published In

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

DOI

Publication Date

January 1, 2012

Start / End Page

320 / 323