Mems and metamaterial-based terahertz detector
© 2012 TRF. We have designed, fabricated and characterized metamaterials-based far-infrared detector. The detector design, which combines metamaterials (MMs) and MEMS, is frequency selective. The enhanced absorption on the cantilever pixels from split-ring resonators (SRRs) leads to a mechanical deflection which is directly detected with a He-Ne beam. As a demonstration of our first-generation devices, we have fabricated and tested detectors at 95 GHz and 693 GHz with noise equivalent powers (NEP) of 10-8W/Hz1/2and single-pixel responsivity as high as 16,500 V/W in a room-temperature and pressure environment.
Tao, H; Kadlec, EA; Strikwerda, AC; Fan, K; Padilla, WJ; Averitt, RD; Shaner, EA; Zhang, X
Technical Digest Solid State Sensors, Actuators, and Microsystems Workshop
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