Flexible, large-area metamaterials fabricated on thin silicon nitride membranes


Journal Article

We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs. © 2008 Optical Society of America.

Duke Authors

Cited Authors

  • Peralta, XG; Arrington, CL; Wanke, MC; Brener, I; Williams, JD; Smirnova, E; Taylor, AJ; O'Hara, JF; Strikwerda, A; Averitt, RD; Padilla, WJ

Published Date

  • January 1, 2008

Published In

Electronic International Standard Serial Number (EISSN)

  • 2162-2701

Citation Source

  • Scopus