Flexible, large-area metamaterials fabricated on thin silicon nitride membranes

Published

Journal Article

We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs. © 2008 Optical Society of America.

Full Text

Published version (via Digital Object Identifier)

Duke Authors

Padilla, Willie John

Cited Authors

Peralta, XG; Arrington, CL; Wanke, MC; Brener, I; Williams, JD; Smirnova, E; Taylor, AJ; O'Hara, JF; Strikwerda, A; Averitt, RD; Padilla, WJ

Published Date

September 15, 2008

Published In

2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro Optics, Cleo/Qels

Digital Object Identifier (DOI)

10.1109/CLEO.2008.4551092

Citation Source

Scopus