Flexible, large-area metamaterials fabricated on thin silicon nitride membranes


Journal Article

We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs. © 2008 Optical Society of America.

Full Text

Duke Authors

Cited Authors

  • Peralta, XG; Arrington, CL; Wanke, MC; Brener, I; Williams, JD; Smirnova, E; Taylor, AJ; O'Hara, JF; Strikwerda, A; Averitt, RD; Padilla, WJ

Published Date

  • September 15, 2008

Published In

  • 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro Optics, Cleo/Qels

Digital Object Identifier (DOI)

  • 10.1109/CLEO.2008.4551092

Citation Source

  • Scopus