Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures

Published

Conference Paper

© 2003 IEEE. In the present study we examine the effect of different thermal hold temperatures on creep and stress relaxation during the first thermal cycle and the effect of maximum cycling temperature on thermal ratcheting. We also explore the use of Atomic Layer Deposition (ALD) Al2O3 nanocoatings for the potential suppression of creep and thermal ratcheting. High-resolution Scanning Electron Microscopy (SEM) is employed to examine surface microstructural changes induced by thermal holding or cycling with and without ALD nanocoatings.

Full Text

Duke Authors

Cited Authors

  • Gall, K; Dunn, ML; Hulse, M; Finch, D; George, SM

Published Date

  • January 1, 2003

Published In

Volume / Issue

  • 2003-January /

Start / End Page

  • 463 - 472

International Standard Serial Number (ISSN)

  • 1541-7026

International Standard Book Number 10 (ISBN-10)

  • 0780376498

Digital Object Identifier (DOI)

  • 10.1109/RELPHY.2003.1197793

Citation Source

  • Scopus