Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion

Journal Article

Full Text

Duke Authors

Cited Authors

  • Ubnoske, SM; Radauscher, EJ; Meshot, ER; Stoner, BR; Parker, CB; Glass, JT

Published Date

  • March 2017

Published In

Volume / Issue

  • 113 /

Chapter

  • C

Start / End Page

  • 192 - 204

International Standard Serial Number (ISSN)

  • 0008-6223

Digital Object Identifier (DOI)

  • 10.1016/j.carbon.2016.11.047