Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect

Published

Conference Paper

© 2003 OSA. We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000 G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss nonblocking 1000x1000-port optical cross-connect switch.

Full Text

Duke Authors

Cited Authors

  • Gasparyan, A; Shea, H; Arney, S; Aksyuk, V; Simon, ME; Pardo, F; Chan, HB; Kim, J; Gates, J; Kraus, JS; Goyal, S; Carr, D; Kleiman, R

Published Date

  • January 1, 2003

Published In

  • Conference on Optical Fiber Communication, Technical Digest Series

Volume / Issue

  • 2003-January /

Start / End Page

  • PD36.1 - PD36.3

International Standard Book Number 10 (ISBN-10)

  • 1557527466

Digital Object Identifier (DOI)

  • 10.1109/OFC.2003.316014

Citation Source

  • Scopus