IIB-6 Shallow p+ -n Junction for CMOS VLSI Application Using Germanium Preamorphization

Journal Article (Journal Article)

Full Text

Duke Authors

Cited Authors

  • Liu, J; Wortman, JJ; Fair, RB

Published Date

  • January 1, 1985

Published In

Volume / Issue

  • 32 / 11

Start / End Page

  • 2533 -

Electronic International Standard Serial Number (EISSN)

  • 1557-9646

International Standard Serial Number (ISSN)

  • 0018-9383

Digital Object Identifier (DOI)

  • 10.1109/T-ED.1985.22321

Citation Source

  • Scopus