Skip to main content

Synthesis of carbon, silicon, and boron-nitride nanostructures via microwave plasma enhanced chemical vapor deposition

Publication ,  Journal Article
Cui, H; Liu, W; Stoner, BR
Published in: Materials Research Society Symposium - Proceedings
January 1, 2001

Carbon, silicon nitride and boron nitride nanostructures were synthesized using microwave plasma enhanced chemical vapor deposition. Both scanning and transmission electron microscopies and x-ray diffraction were used to observe the morphology and structures while energy dispersive x-ray was used to determine the composition of the nanostructured materials. Bamboo-like mukiwalled carbon nanotube structures were observed while silicon nitride showed novel needle- like solid structures. All materials were deposited using a thin film iron catalyst seeded on either silicon with reactive plasma gases containing either a mixture of methane and ammonia or ammonia. A general discussion of the nucleation and growth mechanisms for the various materials will also be included.

Duke Scholars

Published In

Materials Research Society Symposium - Proceedings

ISSN

0272-9172

Publication Date

January 1, 2001

Volume

633

Start / End Page

A13421 / A13426
 

Citation

APA
Chicago
ICMJE
MLA
NLM
Cui, H., Liu, W., & Stoner, B. R. (2001). Synthesis of carbon, silicon, and boron-nitride nanostructures via microwave plasma enhanced chemical vapor deposition. Materials Research Society Symposium - Proceedings, 633, A13421–A13426.
Cui, H., W. Liu, and B. R. Stoner. “Synthesis of carbon, silicon, and boron-nitride nanostructures via microwave plasma enhanced chemical vapor deposition.” Materials Research Society Symposium - Proceedings 633 (January 1, 2001): A13421–26.
Cui H, Liu W, Stoner BR. Synthesis of carbon, silicon, and boron-nitride nanostructures via microwave plasma enhanced chemical vapor deposition. Materials Research Society Symposium - Proceedings. 2001 Jan 1;633:A13421–6.
Cui, H., et al. “Synthesis of carbon, silicon, and boron-nitride nanostructures via microwave plasma enhanced chemical vapor deposition.” Materials Research Society Symposium - Proceedings, vol. 633, Jan. 2001, pp. A13421–26.
Cui H, Liu W, Stoner BR. Synthesis of carbon, silicon, and boron-nitride nanostructures via microwave plasma enhanced chemical vapor deposition. Materials Research Society Symposium - Proceedings. 2001 Jan 1;633:A13421–A13426.

Published In

Materials Research Society Symposium - Proceedings

ISSN

0272-9172

Publication Date

January 1, 2001

Volume

633

Start / End Page

A13421 / A13426