Aligned carbon nanotubes via microwave plasma enhanced chemical vapor deposition
Publication
, Conference
Cui, H; Palmer, D; Zhou, O; Stoner, BR
Published in: Materials Research Society Symposium - Proceedings
December 3, 2000
Aligned multi-wall carbon nanotubes have been grown on silicon substrates by microwave plasma enhanced chemical vapor deposition using methane/ammonia mixtures. The concentration ratio of methane/ammonia in addition to substrate temperature was varied. The morphology, structure and alignment of carbon nanotubes were studied by scanning electron microscopy and transmission electron microscopy. Both concentric hollow and bamboo-type multi-wall carbon nanotubes were observed. Growth rate, size distribution, alignment, morphology, and structure of carbon nanotubes changed with methane/ammonia ratio and growth temperature. Preliminary results on field emission properties are also presented.
Duke Scholars
Published In
Materials Research Society Symposium - Proceedings
ISSN
0272-9172
Publication Date
December 3, 2000
Volume
593
Start / End Page
39 / 44
Citation
APA
Chicago
ICMJE
MLA
NLM
Cui, H., Palmer, D., Zhou, O., & Stoner, B. R. (2000). Aligned carbon nanotubes via microwave plasma enhanced chemical vapor deposition. In Materials Research Society Symposium - Proceedings (Vol. 593, pp. 39–44).
Cui, H., D. Palmer, O. Zhou, and B. R. Stoner. “Aligned carbon nanotubes via microwave plasma enhanced chemical vapor deposition.” In Materials Research Society Symposium - Proceedings, 593:39–44, 2000.
Cui H, Palmer D, Zhou O, Stoner BR. Aligned carbon nanotubes via microwave plasma enhanced chemical vapor deposition. In: Materials Research Society Symposium - Proceedings. 2000. p. 39–44.
Cui, H., et al. “Aligned carbon nanotubes via microwave plasma enhanced chemical vapor deposition.” Materials Research Society Symposium - Proceedings, vol. 593, 2000, pp. 39–44.
Cui H, Palmer D, Zhou O, Stoner BR. Aligned carbon nanotubes via microwave plasma enhanced chemical vapor deposition. Materials Research Society Symposium - Proceedings. 2000. p. 39–44.
Published In
Materials Research Society Symposium - Proceedings
ISSN
0272-9172
Publication Date
December 3, 2000
Volume
593
Start / End Page
39 / 44