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Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition

Publication ,  Journal Article
Cui, H; Zhou, O; Stoner, BR
Published in: Journal of Applied Physics
November 15, 2000

Aligned multiwall carbon nanotubes have been grown on silicon substrates by microwave plasma enhanced chemical vapor deposition using methane/ammonia mixtures. Scanning electron microscopy shows that the nanotubes are well aligned with high aspect ratio and growth direction normal to the substrate. Transmission electron microscopy reveals that the majority phase has a bamboo-like structure. Data are also presented showing process variable effects on the size and microstructure of the aligned nanotubes, giving insight into possible nucleation and growth mechanisms for the process. © 2000 American Institute of Physics.

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Published In

Journal of Applied Physics

DOI

ISSN

0021-8979

Publication Date

November 15, 2000

Volume

88

Issue

10

Start / End Page

6072 / 6074

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 49 Mathematical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences
  • 01 Mathematical Sciences
 

Citation

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Cui, H., Zhou, O., & Stoner, B. R. (2000). Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition. Journal of Applied Physics, 88(10), 6072–6074. https://doi.org/10.1063/1.1320024
Cui, H., O. Zhou, and B. R. Stoner. “Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition.” Journal of Applied Physics 88, no. 10 (November 15, 2000): 6072–74. https://doi.org/10.1063/1.1320024.
Cui H, Zhou O, Stoner BR. Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition. Journal of Applied Physics. 2000 Nov 15;88(10):6072–4.
Cui, H., et al. “Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition.” Journal of Applied Physics, vol. 88, no. 10, Nov. 2000, pp. 6072–74. Scopus, doi:10.1063/1.1320024.
Cui H, Zhou O, Stoner BR. Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition. Journal of Applied Physics. 2000 Nov 15;88(10):6072–6074.
Journal cover image

Published In

Journal of Applied Physics

DOI

ISSN

0021-8979

Publication Date

November 15, 2000

Volume

88

Issue

10

Start / End Page

6072 / 6074

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 49 Mathematical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences
  • 01 Mathematical Sciences