Novel optical-waveguide sensing platform based on input grating coupler
Published
Conference Paper
Silicon oxynitride optical waveguides with a grating coupler were used for a label-free detection approach that measures the change of refractive index at the grating surface. Two approaches were used for the grating fabrication: (i) commercially available linear gratings were used as stamps for imprint lithography and the pattern was transferred by dry-etching; (ii) polystyrene microspheres self-assembly in an ordered close-packed array was exploited to obtain a two-dimensional grating with hexagonal symmetry. Optical coupling into slab waveguides of both visible (633nm) and tunable infrared (1550 nm) lasers was characterized as a function of incident angle in a custom-made automated apparatus. Sensitivity to different aqueous solutions was demonstrated with low loss waveguides fabricated using low-frequency plasma-enhanced chemical vapor deposition. The exploitation of the tunability of telecom infrared lasers and of the two-dimensional hexagonal grating coupler has the ultimate goal of providing a high performance, compact sensor that does not require mechanical moving parts.
Full Text
Duke Authors
Cited Authors
- Grego, S; Naskar, S; Patel, AM; Huffman, A; Bower, CA; Stoner, BR
Published Date
- May 25, 2006
Published In
Volume / Issue
- 6123 /
International Standard Serial Number (ISSN)
- 0277-786X
International Standard Book Number 10 (ISBN-10)
- 0819461652
International Standard Book Number 13 (ISBN-13)
- 9780819461650
Digital Object Identifier (DOI)
- 10.1117/12.646302
Citation Source
- Scopus