Optical waveguide biosensor based on two-dimensional diffractive elements obtained by nano-imprint lithography

Conference Paper

This work focuses on the effects of custom-designed, two-dimensional grating structures on the sensitivity of optical waveguides biosensors in the input grating coupler configuration. Calculations suggest that suitably designed diffractive structures with optimum pitch in two orthogonal directions can increase the sensitivity of devices when compared to a conventional one-dimensional grating under the same conditions. A set of six diffractive structures designed for 1550 nm wavelength were fabricated by thermal nano-imprint lithography on silicon oxynitride waveguides; the silicon master stamp was patterned by deep UV stepper lithography. Preliminary experimental results indicate a sensitivity enhancement of a factor two due to the 2D diffractive couplers.

Full Text

Duke Authors

Cited Authors

  • Grego, S; Yang, C; Bower, CA; Stoner, BR; Suleski, TJ

Published Date

  • May 24, 2007

Published In

Volume / Issue

  • 6475 /

International Standard Serial Number (ISSN)

  • 0277-786X

International Standard Book Number 10 (ISBN-10)

  • 0819465887

International Standard Book Number 13 (ISBN-13)

  • 9780819465887

Digital Object Identifier (DOI)

  • 10.1117/12.700616

Citation Source

  • Scopus