Advanced processing techniques for through-wafer interconnects
Publication
, Conference
Burkett, SL; Qiao, X; Temple, D; Stoner, B; McGuire, G
Published in: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
January 1, 2004
Duke Scholars
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Published In
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
DOI
ISSN
1071-1023
Publication Date
January 1, 2004
Volume
22
Issue
1
Start / End Page
248 / 256
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4016 Materials engineering
- 0912 Materials Engineering
- 0901 Aerospace Engineering
- 0401 Atmospheric Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Burkett, S. L., Qiao, X., Temple, D., Stoner, B., & McGuire, G. (2004). Advanced processing techniques for through-wafer interconnects. In Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures (Vol. 22, pp. 248–256). https://doi.org/10.1116/1.1642643
Burkett, S. L., X. Qiao, D. Temple, B. Stoner, and G. McGuire. “Advanced processing techniques for through-wafer interconnects.” In Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 22:248–56, 2004. https://doi.org/10.1116/1.1642643.
Burkett SL, Qiao X, Temple D, Stoner B, McGuire G. Advanced processing techniques for through-wafer interconnects. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004. p. 248–56.
Burkett, S. L., et al. “Advanced processing techniques for through-wafer interconnects.” Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 22, no. 1, 2004, pp. 248–56. Scopus, doi:10.1116/1.1642643.
Burkett SL, Qiao X, Temple D, Stoner B, McGuire G. Advanced processing techniques for through-wafer interconnects. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004. p. 248–256.
Published In
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
DOI
ISSN
1071-1023
Publication Date
January 1, 2004
Volume
22
Issue
1
Start / End Page
248 / 256
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4016 Materials engineering
- 0912 Materials Engineering
- 0901 Aerospace Engineering
- 0401 Atmospheric Sciences