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Advanced processing techniques for through-wafer interconnects

Publication ,  Conference
Burkett, SL; Qiao, X; Temple, D; Stoner, B; McGuire, G
Published in: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
January 1, 2004

Duke Scholars

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Published In

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

DOI

ISSN

1071-1023

Publication Date

January 1, 2004

Volume

22

Issue

1

Start / End Page

248 / 256

Related Subject Headings

  • Applied Physics
  • 5104 Condensed matter physics
  • 4016 Materials engineering
  • 0912 Materials Engineering
  • 0901 Aerospace Engineering
  • 0401 Atmospheric Sciences
 

Citation

APA
Chicago
ICMJE
MLA
NLM
Burkett, S. L., Qiao, X., Temple, D., Stoner, B., & McGuire, G. (2004). Advanced processing techniques for through-wafer interconnects. In Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures (Vol. 22, pp. 248–256). https://doi.org/10.1116/1.1642643
Burkett, S. L., X. Qiao, D. Temple, B. Stoner, and G. McGuire. “Advanced processing techniques for through-wafer interconnects.” In Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 22:248–56, 2004. https://doi.org/10.1116/1.1642643.
Burkett SL, Qiao X, Temple D, Stoner B, McGuire G. Advanced processing techniques for through-wafer interconnects. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004. p. 248–56.
Burkett, S. L., et al. “Advanced processing techniques for through-wafer interconnects.” Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 22, no. 1, 2004, pp. 248–56. Scopus, doi:10.1116/1.1642643.
Burkett SL, Qiao X, Temple D, Stoner B, McGuire G. Advanced processing techniques for through-wafer interconnects. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004. p. 248–256.

Published In

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

DOI

ISSN

1071-1023

Publication Date

January 1, 2004

Volume

22

Issue

1

Start / End Page

248 / 256

Related Subject Headings

  • Applied Physics
  • 5104 Condensed matter physics
  • 4016 Materials engineering
  • 0912 Materials Engineering
  • 0901 Aerospace Engineering
  • 0401 Atmospheric Sciences