Optical nondestructive dynamic measurements of wafer-scale encapsulated nanofluidic channels.

Journal Article (Journal Article)

Nanofluidic channels are of great interest for DNA sequencing, chromatography, and drug delivery. However, metrology of embedded or sealed nanochannels and measurement of their fill-state have remained extremely challenging. Existing techniques have been restricted to optical microscopy, which suffers from insufficient resolution, or scanning electron microscopy, which cannot measure sealed or embedded channels without cleaving the sample. Here, we demonstrate a novel method for accurately extracting nanochannel cross-sectional dimensions and monitoring fluid filling, utilizing spectroscopic ellipsometric scatterometry, combined with rigorous electromagnetic simulations. Our technique is capable of measuring channel dimensions with better than 5-nm accuracy and assessing channel filling within seconds. The developed technique is, thus, well suited for both process monitoring of channel fabrication as well as for studying complex phenomena of fluid flow through nanochannel structures.

Full Text

Duke Authors

Cited Authors

  • Liberman, V; Smith, M; Weaver, I; Rothschild, M

Published Date

  • May 2018

Published In

Volume / Issue

  • 57 / 15

Start / End Page

  • 4337 - 4344

PubMed ID

  • 29791411

Electronic International Standard Serial Number (EISSN)

  • 1539-4522

International Standard Serial Number (ISSN)

  • 1559-128X

Digital Object Identifier (DOI)

  • 10.1364/ao.57.004337


  • eng