Integrated Thin Film Silicon Detectors for Fluorescence Sensing

Conference Paper

The design, fabrication and test of a thin film Si chip-scale fluorescence sensor designed for integration with microfluidic systems isG reported. The photodetector has low dark current (pA) and responsivity of 0.3 A/W at 532 nm. Droplets of 10 microliter with varying fluorophore concentrations were tested and the data is linear with a model fit with 95% confidence and signal to noise ratios greater than 20 dB.

Full Text

Duke Authors

Cited Authors

  • Dighe, A; Jokerst, NM

Published Date

  • December 26, 2018

Published In

Volume / Issue

  • 2018-October /

Electronic International Standard Serial Number (EISSN)

  • 2168-9229

International Standard Serial Number (ISSN)

  • 1930-0395

International Standard Book Number 13 (ISBN-13)

  • 9781538647073

Digital Object Identifier (DOI)

  • 10.1109/ICSENS.2018.8589547

Citation Source

  • Scopus