MEMS and metamaterials: A perfect marriage at terahertz frequencies
© 2008 TRF. This paper reports our recent progress on creating active structures and devices to enhance the ability to manipulate and detect far-infrared, or terahertz (THz), radiation by combining electromagnetic metamaterials with MEMS technologies. We have designed, simulated, and fabricated state-of-the-art THz components which include a THz resonance switch, flexible THz metamaterials, and 3D THz metamaterials. Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for THz applications.
Tao, H; Bingham, C; Strikwerda, A; Fan, K; Padilla, WJ; Averitt, RD; Zhang, X
Technical Digest Solid State Sensors, Actuators, and Microsystems Workshop
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International Standard Book Number 10 (ISBN-10)
International Standard Book Number 13 (ISBN-13)