MEMS and metamaterials: A perfect marriage at terahertz frequencies


Conference Paper

© 2008 TRF. This paper reports our recent progress on creating active structures and devices to enhance the ability to manipulate and detect far-infrared, or terahertz (THz), radiation by combining electromagnetic metamaterials with MEMS technologies. We have designed, simulated, and fabricated state-of-the-art THz components which include a THz resonance switch, flexible THz metamaterials, and 3D THz metamaterials. Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for THz applications.

Full Text

Duke Authors

Cited Authors

  • Tao, H; Bingham, C; Strikwerda, A; Fan, K; Padilla, WJ; Averitt, RD; Zhang, X

Published Date

  • January 1, 2008

Published In

  • Technical Digest Solid State Sensors, Actuators, and Microsystems Workshop

Start / End Page

  • 54 - 55

International Standard Book Number 10 (ISBN-10)

  • 0964002477

International Standard Book Number 13 (ISBN-13)

  • 9780964002470

Digital Object Identifier (DOI)

  • 10.31438/trf.hh2008.15

Citation Source

  • Scopus