Micromachined broadside-coupled tunable metamaterials


Conference Paper

© 2014TRF. This paper reports a micromachined tunable metamaterial based on broadside-coupled split ring resonators (BC-SRRs). The device consists of two layers of SRRs stacked on top of each other with an air gap spacer, forming the BC-SRRs. One of the layers is fixed, while the other can be driven by an electrostatic comb-drive actuator. The lateral displacement between the two layers of SRRs can be changed by the actuator, resulting in the tuning of resonance frequencies of the BC-SRRs and thus the transmission spectrum of the device. The preliminary results show that the resonance frequency can be tuned up to 100GHz corresponding to an 18μm lateral displacement. Our tunable metamaterials have promising applications as THz modulators, filters and sensors.

Cited Authors

  • Zhao, X; Fan, K; Zhang, J; Keiser, GR; Seren, HR; Averitt, RD; Zhang, X

Published Date

  • January 1, 2014

Published In

  • Technical Digest Solid State Sensors, Actuators, and Microsystems Workshop

Start / End Page

  • 375 - 378

International Standard Book Number 13 (ISBN-13)

  • 9781940470016

Citation Source

  • Scopus