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Waveguide-integrated nanowire photoconductors on a non-single crystal surface

Publication ,  Conference
Grego, S; Gilchrist, KH; Kim, JY; Kwon, MK; Islam, MS
Published in: Proceedings of SPIE - The International Society for Optical Engineering
November 23, 2009

The growth of crystalline 1D nanowires of semiconductors on non-epitaxial surfaces holds the promise to overcome many of the current challenges of heteroepitaxial material synthesis and device fabrication for a wide range of electronic and photonic applications. Nano-heteroepitaxial bridging of CVD grown nanowires potentially enables a low cost and mass-manufacturable approach to nanowire based device fabrication. Here we report the synthesis and bridging of lateral silicon nanowires between a pair of vertical non-single crystal surfaces and application of this technique in the design and fabrication of waveguide-integrated photodetectors. The device consists of a number of 1D nanowires laterally grown across gaps etched into rib optical waveguides with an amorphous silicon oxynitride core and silicon oxide claddings. A pair of phosphorous-doped polysilicon electrodes was deposited on the walls of the waveguide gap for electrical interfacing of the nanowires to collect the photocurrent under optical excitation. Characterization results demonstrated good waveguide characteristics, high electrical isolation between the electrodes, low leakage current and distinct photoresponse from the bridged nanowires. This implementation of silicon nanowires on polysilicon combines the characteristics of crystalline 1D nanowires with the flexible fabrication processes on non-single-crystal silicon platforms facilitating advances in silicon photonics and beyond. © 2009 SPIE.

Duke Scholars

Published In

Proceedings of SPIE - The International Society for Optical Engineering

DOI

ISSN

0277-786X

ISBN

9780819476968

Publication Date

November 23, 2009

Volume

7406

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
 

Citation

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Grego, S., Gilchrist, K. H., Kim, J. Y., Kwon, M. K., & Islam, M. S. (2009). Waveguide-integrated nanowire photoconductors on a non-single crystal surface. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 7406). https://doi.org/10.1117/12.825260
Grego, S., K. H. Gilchrist, J. Y. Kim, M. K. Kwon, and M. S. Islam. “Waveguide-integrated nanowire photoconductors on a non-single crystal surface.” In Proceedings of SPIE - The International Society for Optical Engineering, Vol. 7406, 2009. https://doi.org/10.1117/12.825260.
Grego S, Gilchrist KH, Kim JY, Kwon MK, Islam MS. Waveguide-integrated nanowire photoconductors on a non-single crystal surface. In: Proceedings of SPIE - The International Society for Optical Engineering. 2009.
Grego, S., et al. “Waveguide-integrated nanowire photoconductors on a non-single crystal surface.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 7406, 2009. Scopus, doi:10.1117/12.825260.
Grego S, Gilchrist KH, Kim JY, Kwon MK, Islam MS. Waveguide-integrated nanowire photoconductors on a non-single crystal surface. Proceedings of SPIE - The International Society for Optical Engineering. 2009.

Published In

Proceedings of SPIE - The International Society for Optical Engineering

DOI

ISSN

0277-786X

ISBN

9780819476968

Publication Date

November 23, 2009

Volume

7406

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering