A comb-drive actuator enabled dynamically tunable terahertz metamaterial
© 2016 TRF This paper reports our recent progress on a dynamically tunable terahertz metamaterial based on broadside-coupled split ring resonators (BC-SRRs) and a comb-drive actuator. In the structure, the coupling between two arrays of SRR is modulated with the lateral displacement exerted by the comb-drive actuator. In the spectrum of BC-SRRs, two resonant modes can be observed, i.e. symmetric mode and anti-symmetric mode, due to the strong inductive and capacitive coupling. Over 20 μm lateral displacement, the symmetric mode blueshifts ~60 GHz and the anti-symmetric mode redshifts ~50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 69%. We can realize a large tuning range with structure optimization, thereby enabling the applications including THz modulators and chemical sensing.
Zhao, X; Zhang, J; Fan, K; Keiser, GR; Duan, G; Averitt, RD; Zhang, X
2016 Solid State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
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International Standard Book Number 13 (ISBN-13)
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