A comb-drive actuator enabled dynamically tunable terahertz metamaterial


Conference Paper

© 2016 TRF This paper reports our recent progress on a dynamically tunable terahertz metamaterial based on broadside-coupled split ring resonators (BC-SRRs) and a comb-drive actuator. In the structure, the coupling between two arrays of SRR is modulated with the lateral displacement exerted by the comb-drive actuator. In the spectrum of BC-SRRs, two resonant modes can be observed, i.e. symmetric mode and anti-symmetric mode, due to the strong inductive and capacitive coupling. Over 20 μm lateral displacement, the symmetric mode blueshifts ~60 GHz and the anti-symmetric mode redshifts ~50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 69%. We can realize a large tuning range with structure optimization, thereby enabling the applications including THz modulators and chemical sensing.

Full Text

Cited Authors

  • Zhao, X; Zhang, J; Fan, K; Keiser, GR; Duan, G; Averitt, RD; Zhang, X

Published Date

  • January 1, 2016

Published In

  • 2016 Solid State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Start / End Page

  • 214 - 217

International Standard Book Number 13 (ISBN-13)

  • 9781940470023

Digital Object Identifier (DOI)

  • 10.31438/trf.hh2016.58

Citation Source

  • Scopus