Aerosol Jet Printing of SU-8 as a Passivation Layer Against Ionic Solutions.

To ensure stability for low-cost electronics used in direct contact with ionic solutions (such as electronic biosensors), electrodes are frequently passivated to protect against current leakage, which leads to corrosion. The epoxy-based polymer SU-8 yields favorable properties for passivation against ionic solutions. However, it is nearly universally patterned via cleanroom techniques, which increases device cost and fabrication complexity. Printing electronic components has been shown to be a viable approach for decreasing fabrication cost. Previous reports on SU-8 printing focus on the resultant printed structure, with little emphasis on its subsequent use as a passivation layer. Here, we demonstrate the printing of SU-8 with an aerosol jet printer using ultrasonic aerosolization. We show that SU-8 can be printed without reformulation, and that printed SU-8 is a viable passivation layer over conductive silver lines, when tested in ionic solutions. Extending the printed SU-8 film beyond the underlying conductive electrodes by 100 μm produced a six order of magnitude decrease in leakage current and resulted high stability over 20 voltage sweeps. Finally, we optimized post-printing cure time to 15 minutes at 160°C, which further minimized leakage current. While the development of low-cost, electronic biosensing devices has increasingly moved towards printing methods, the lack of a printed passivation strategy has hindered this transition. The advancements made in this study towards an aerosol jet printable SU-8 passivation layer provide useful progress towards a fully printed, stable electronic biosensing device.

Duke Scholars

Author Aaron D. Franklin Electrical and Computer Engineering