Design, fabrication, and performance of an integrated optoelectronic cellular array
An optoelectronic integrated circuit (OEIC) suitable for applications requiring highly parallel optical interconnections has been designed, fabricated, and demonstrated. The chip integrates optical emitters, optical detectors, and GaAs based electronic I.C.s on the same substrate. Its architecture consists of a two-dimensional 8 × 8 array of cells, with each cell containing a double heterojunction light emitting diode (LED), a lateral ion-implanted photoconducting detector (PD), and a GaAs metal-semiconductor field effect transistor (MESFET) circuit which performs amplification of the detector signal, thresholding, memory, and LED drive functions. The chip consists of a total of 1300 FETs, 64 LEDs, 64 photodetectors, and 500 thin-film resistors. Discrete devices fabricated with the integrated process have performance characteristics similar to those of nonintegrated devices. The electrical and optical functionality of 8 × 8 arrays has been demonstrated. However, a feedback problem has been shown to exist between the LEDs and LED driver FETs. The source of this problem is discussed.
Hibbs-Brenner, MK; Mukherjee, SD; Skogen, J; Grung, B; Kalweit, E; Bendett, MP
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International Standard Book Number 10 (ISBN-10)