Active to passive element micro-assembly for photonic micro-systems
Publication
, Journal Article
Mukherjee, SD; Bakke, T
Published in: Proceedings of SPIE - The International Society for Optical Engineering
January 1, 1999
New methods for integration of dissimilar components and optical inputs/outputs are expected to mass-produce photonic micro-systems at reduced levels of difficulty and therefore reduced cost. These methods involve monolithic and hybrid approaches, the latter at both wafer-to-wafer and chip-to-wafer levels. Broadly, these are called `heterogeneous integration' and encompass technologies as diverse as wafer-fusion and DNA-assisted micro-assembly. This review summarizes the associated micro-assembly techniques and discusses their possible influence upon cost- and yield-benefits to industry.
Duke Scholars
Published In
Proceedings of SPIE - The International Society for Optical Engineering
ISSN
0277-786X
Publication Date
January 1, 1999
Volume
3666
Start / End Page
237 / 245
Citation
APA
Chicago
ICMJE
MLA
NLM
Mukherjee, S. D., & Bakke, T. (1999). Active to passive element micro-assembly for photonic micro-systems. Proceedings of SPIE - The International Society for Optical Engineering, 3666, 237–245.
Mukherjee, S. D., and T. Bakke. “Active to passive element micro-assembly for photonic micro-systems.” Proceedings of SPIE - The International Society for Optical Engineering 3666 (January 1, 1999): 237–45.
Mukherjee SD, Bakke T. Active to passive element micro-assembly for photonic micro-systems. Proceedings of SPIE - The International Society for Optical Engineering. 1999 Jan 1;3666:237–45.
Mukherjee, S. D., and T. Bakke. “Active to passive element micro-assembly for photonic micro-systems.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 3666, Jan. 1999, pp. 237–45.
Mukherjee SD, Bakke T. Active to passive element micro-assembly for photonic micro-systems. Proceedings of SPIE - The International Society for Optical Engineering. 1999 Jan 1;3666:237–245.
Published In
Proceedings of SPIE - The International Society for Optical Engineering
ISSN
0277-786X
Publication Date
January 1, 1999
Volume
3666
Start / End Page
237 / 245