Three Dimensional Integration of an 8x8 Array of Thin Film GaAs/AlGaAs Photodetectors with Vertical Electrical Interconnects to Underlying Silicon Circuitry

Conference Paper

This paper reports the three dimensional integration of an 8x8 array of individually addressable thin film GaAs based photodetectors with vertical electrical interconnects to underlying silicon circuitry. This array demonstrated a yield of 100%.

Duke Authors

Cited Authors

  • Fike, S; Buchanan, B; Jokerst, NM; Brooke, MA; Morris, T; DeWeerth, S

Published Date

  • January 1, 1995

Published In

  • Optics Infobase Conference Papers

International Standard Book Number 13 (ISBN-13)

  • 9781557528209

Citation Source

  • Scopus