Modal pattern analysis of multimode interferometric sensors applied to fully integrated silicon-based chem/bio sensors

Conference Paper

A multimode, Mach-Zehnder, interferometric chem/bio sensor with sensitivity developed through modal pattern tracking and analysis is demonstrated on silicon. Simulated and experimental data, show that integrated structures of length <5000 µm together with modal analysis permit fully-integrated sensors with index sensitivities near 10-6 and methanol vapor sensitivities approaching 500 ppb.

Duke Authors

Cited Authors

  • Lillie, JJ; Thomas, MA; Dennis, KA; Jokerst, NM; Henderson, C; Ralph, SE

Published Date

  • January 1, 2004

Published In

  • Optics Infobase Conference Papers

International Standard Book Number 13 (ISBN-13)

  • 9781557528209

Citation Source

  • Scopus