Phase-resolved depth profiling of thin-layered plasma polymer films by step-scan Fourier transform infrared photoacoustic spectroscopy

Journal Article (Journal Article)

After reviewing the background of step-scan interferometric photoacoustic spectroscopy, this paper describes a step-scan Fourier transform photoacoustic phase-resolved technique and its applications in depth profiling of micrometerthick layered plasma poly-mers. In particular, the power of direct use of the photoacoustic phase spectrum in both qualitative and quantitative depth profiling of the layered samples is extensively discussed. The effects of both spatial origin and intensity of a photoacoustic signal on its phase have been explicitly analyzed for both overlapping and distinctive, nonoverlapping, bands of the thin-layered plasma polymer samples. The phase spectrum technique is shown to be a very effective and efficient method of spectral depth profiling analysis.

Full Text

Duke Authors

Cited Authors

  • Jiang, EY; Palmer, RA; Barr, NE; Morosoff, N

Published Date

  • January 1, 1997

Published In

Volume / Issue

  • 51 / 8

Start / End Page

  • 1238 - 1244

International Standard Serial Number (ISSN)

  • 0003-7028

Digital Object Identifier (DOI)

  • 10.1366/0003702971941818

Citation Source

  • Scopus