ROLE OF VACANCIES AND SELF-INTERSTITIALS IN DIFFUSION AND AGGLOMERATION PHENOMENA IN SILICON.

Duke Authors

Cited Authors

  • Goesele, U; Tan, TY

Published Date

  • 1983

Published In

  • Proceedings - The Electrochemical Society

Volume / Issue

  • 83-4 /

Start / End Page

  • 17 - 36

Citation Source

  • SciVal