Sulfur diffusion and the interstitial contribution to arsenic self-diffusion in GaAs
Publication
, Journal Article
Uematsu, M; Werner, P; Schultz, M; Tan, TY; Gösele, UM
Published in: Applied Physics Letters
December 1, 1995
A quantitative determination of the contribution of As self-interstitials to the As self-diffusion coefficient in GaAs has been carried out. Values of the As self-interstitial contributions are deduced from sulfur indiffusion profiles in GaAs, which are simulated based on the kick-out mechanism. Furthermore, the relative contributions of As self-interstitials and of As vacancies are discussed.© 1995 American Institute of Physics.
Duke Scholars
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
December 1, 1995
Volume
67
Start / End Page
2863
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Uematsu, M., Werner, P., Schultz, M., Tan, T. Y., & Gösele, U. M. (1995). Sulfur diffusion and the interstitial contribution to arsenic self-diffusion in GaAs. Applied Physics Letters, 67, 2863. https://doi.org/10.1063/1.114810
Uematsu, M., P. Werner, M. Schultz, T. Y. Tan, and U. M. Gösele. “Sulfur diffusion and the interstitial contribution to arsenic self-diffusion in GaAs.” Applied Physics Letters 67 (December 1, 1995): 2863. https://doi.org/10.1063/1.114810.
Uematsu M, Werner P, Schultz M, Tan TY, Gösele UM. Sulfur diffusion and the interstitial contribution to arsenic self-diffusion in GaAs. Applied Physics Letters. 1995 Dec 1;67:2863.
Uematsu, M., et al. “Sulfur diffusion and the interstitial contribution to arsenic self-diffusion in GaAs.” Applied Physics Letters, vol. 67, Dec. 1995, p. 2863. Scopus, doi:10.1063/1.114810.
Uematsu M, Werner P, Schultz M, Tan TY, Gösele UM. Sulfur diffusion and the interstitial contribution to arsenic self-diffusion in GaAs. Applied Physics Letters. 1995 Dec 1;67:2863.
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
December 1, 1995
Volume
67
Start / End Page
2863
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences