CHARACTERIZATION OF SEMICONDUCTOR SILICON TRANSMISSION ELECTRON MICROSCOPY.

In this review some basics of the transmission electron microscopy, the instrument, its operations and the types of scientific information obtainable from crystalline materials are first discussed and then some subjects pertaining to recent characterization of silicon are discussed. The subjects chosen are those that had outstanding impacts in technology and/or in science for which studies using the transmission electron microscope forms an indispensible part of the characterization efforts.

Duke Authors

Cited Authors

  • Tan, TY

Published Date

  • 1984

Published In

  • Proceedings of SPIE - The International Society for Optical Engineering

Volume / Issue

  • 452 /

Start / End Page

  • 170 - 176

Citation Source

  • SciVal