Characterization of semiconductor silicon by transmission electron microscopy


Journal Article

In this review some basics of the transmission electron microscopy, the instrument, its operations and the types of scientific information obtainable from crystalline materials are first discussed and then some subjects pertaining to recent characterization of silicon are discussed. The subjects chosen are those that had outstanding impacts in technology and/or in science for which studies using the transmission electron microscope forms an indispen- sible part of the characterization efforts. © 1984 SPIE.

Full Text

Duke Authors

Cited Authors

  • Tan, TY

Published Date

  • May 10, 1984

Published In

Volume / Issue

  • 452 /

Start / End Page

  • 170 - 176

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

International Standard Serial Number (ISSN)

  • 0277-786X

Digital Object Identifier (DOI)

  • 10.1117/12.939302

Citation Source

  • Scopus