Twist wafer bonded ''fixed-film'' versus ''compliant'' substrates: Correlated misfit dislocation generation and contaminant gettering

Full Text

Duke Authors

Cited Authors

  • Tan, TY; Gosele, U

Published Date

  • June 1997

Published In

Volume / Issue

  • 64 / 6

Start / End Page

  • 631 - 633

International Standard Serial Number (ISSN)

  • 0947-8396

Digital Object Identifier (DOI)

  • 10.1007/s003390050530