COPRECIPITATION OF CARBON AND OXYGEN IN SILICON - THE DOMINANT FLUX CRITERION

Full Text

Duke Authors

Cited Authors

  • TAYLOR, W; GOSELE, U; TAN, T

Published Date

  • November 1993

Published In

Volume / Issue

  • 32 / 11A

Start / End Page

  • 4857 - 4862

International Standard Serial Number (ISSN)

  • 0021-4922

Digital Object Identifier (DOI)

  • 10.1143/JJAP.32.4857