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Hydrogenated amorphous-silicon thin films produced by ion plating

Publication ,  Journal Article
Cocks, FH; Scharman, AJ; Jones, PL; Cogan, SF
Published in: Applied Physics Letters
December 1, 1980
Published version (DOI)

Ion plating techniques have been used to produce amorphous-silicon thin films which contain up to 25 atomic percent hydrogen. The Si-H bond stretching mode observed for hydrogenated amorphous-silicon thin films produced by glow-discharge decomposition methods is also observed for these ion-plated films. Optical absorptivity measurements for ion-plated films give band-gap values between 1.58 and 1.90 eV.

Duke Scholars

F. Hadley Cocks
Author F. Hadley Cocks Thomas Lord Department of Mechanical Engineering and Materia ...

Published In

Applied Physics Letters

DOI

10.1063/1.91363

ISSN

0003-6951

Publication Date

December 1, 1980

Volume

36

Issue

11

Start / End Page

909 / 910

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 10 Technology
  • 09 Engineering
  • 02 Physical Sciences
 

Citation

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Cocks, F. H., Scharman, A. J., Jones, P. L., & Cogan, S. F. (1980). Hydrogenated amorphous-silicon thin films produced by ion plating. Applied Physics Letters, 36(11), 909–910. https://doi.org/10.1063/1.91363
Cocks, F. H., A. J. Scharman, P. L. Jones, and S. F. Cogan. “Hydrogenated amorphous-silicon thin films produced by ion plating.” Applied Physics Letters 36, no. 11 (December 1, 1980): 909–10. https://doi.org/10.1063/1.91363.
Cocks FH, Scharman AJ, Jones PL, Cogan SF. Hydrogenated amorphous-silicon thin films produced by ion plating. Applied Physics Letters. 1980 Dec 1;36(11):909–10.
Cocks, F. H., et al. “Hydrogenated amorphous-silicon thin films produced by ion plating.” Applied Physics Letters, vol. 36, no. 11, Dec. 1980, pp. 909–10. Scopus, doi:10.1063/1.91363.
Cocks FH, Scharman AJ, Jones PL, Cogan SF. Hydrogenated amorphous-silicon thin films produced by ion plating. Applied Physics Letters. 1980 Dec 1;36(11):909–910.

Published In

Applied Physics Letters

DOI

10.1063/1.91363

ISSN

0003-6951

Publication Date

December 1, 1980

Volume

36

Issue

11

Start / End Page

909 / 910

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 10 Technology
  • 09 Engineering
  • 02 Physical Sciences