Electrostatic micromachine scanning mirror for optical coherence tomography.


Journal Article

Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz.

Full Text

Duke Authors

Cited Authors

  • Zara, JM; Yazdanfar, S; Rao, KD; Izatt, JA; Smith, SW

Published Date

  • April 2003

Published In

Volume / Issue

  • 28 / 8

Start / End Page

  • 628 - 630

PubMed ID

  • 12703922

Pubmed Central ID

  • 12703922

Electronic International Standard Serial Number (EISSN)

  • 1539-4794

International Standard Serial Number (ISSN)

  • 0146-9592

Digital Object Identifier (DOI)

  • 10.1364/ol.28.000628


  • eng