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A micromachine high frequency ultrasound scanner using photolithographic fabrication.

Publication ,  Journal Article
Zara, JM; Smith, SW
Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control
July 2002
Published version (DOI)

In this paper we describe two new types of transducer assemblies fabricated from polyimide films with photolithography that use a polyimide micromachine (MEMS) actuator to mechanically scan an ultrasound beam. Forward viewing transducers pivoting on cantilever hinges and side scanning transducers tilting on torsion hinges were fabricated on polyimide substrates with tables 1.125 mm and 2.25 mm wide. PZT transducers fabricated on these tables operating at 20 MHz and 30 MHz yielded insertion losses of 20-26 dB and fractional bandwidths of 34-49%. The transducer assemblies driven by MEMS actuators produced sector scans of 45-60 degrees in air at resonant frequencies of 32 to 90 Hz and sector scans in fluid of 6-8 degrees. Real time images of wire phantoms were obtained using a single channel imaging system based on a personal computer platform with LabVIEW (National Instruments Corp., Austin, TX) software.

Duke Scholars

Stephen William Smith
Author Stephen William Smith Biomedical Engineering

Published In

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

DOI

10.1109/tuffc.2002.1020165

EISSN

1525-8955

ISSN

0885-3010

Publication Date

July 2002

Volume

49

Issue

7

Start / End Page

947 / 958

Related Subject Headings

  • Ultrasonography
  • Transducers
  • Resins, Synthetic
  • Phantoms, Imaging
  • Materials Testing
  • Equipment Design
  • Acoustics
  • 51 Physical sciences
  • 40 Engineering
  • 09 Engineering
 

Citation

APA
Chicago
ICMJE
MLA
NLM
Zara, J. M., & Smith, S. W. (2002). A micromachine high frequency ultrasound scanner using photolithographic fabrication. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 49(7), 947–958. https://doi.org/10.1109/tuffc.2002.1020165
Zara, Jason M., and Stephen W. Smith. “A micromachine high frequency ultrasound scanner using photolithographic fabrication.” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 49, no. 7 (July 2002): 947–58. https://doi.org/10.1109/tuffc.2002.1020165.
Zara JM, Smith SW. A micromachine high frequency ultrasound scanner using photolithographic fabrication. IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2002 Jul;49(7):947–58.
Zara, Jason M., and Stephen W. Smith. “A micromachine high frequency ultrasound scanner using photolithographic fabrication.” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 49, no. 7, July 2002, pp. 947–58. Epmc, doi:10.1109/tuffc.2002.1020165.
Zara JM, Smith SW. A micromachine high frequency ultrasound scanner using photolithographic fabrication. IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2002 Jul;49(7):947–958.

Published In

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

DOI

10.1109/tuffc.2002.1020165

EISSN

1525-8955

ISSN

0885-3010

Publication Date

July 2002

Volume

49

Issue

7

Start / End Page

947 / 958

Related Subject Headings

  • Ultrasonography
  • Transducers
  • Resins, Synthetic
  • Phantoms, Imaging
  • Materials Testing
  • Equipment Design
  • Acoustics
  • 51 Physical sciences
  • 40 Engineering
  • 09 Engineering