Status and promise of compliant substrate technology

Journal Article (Journal Article)

Compliant substrates offer significant promise as a new approach for strain management in semiconductors. The primary application is to produce device-quality highly mismatched materials on dissimilar substrates. Various implementations and processes for achieving substrate compliancy have been proposed and demonstrated. These include the use of twist-, glass-, and metal-bonds, and the use of engineered templates realized with laterally oxidized Al-containing alloys. A recent focus in our work has been on the growth of GaN on a novel and easily removable substrate - lithium gallate - for regrowth on a bonded GaN template.

Full Text

Duke Authors

Cited Authors

  • Brown, AS; Doolittle, WA

Published Date

  • October 9, 2000

Published In

Volume / Issue

  • 166 / 1

Start / End Page

  • 392 - 398

International Standard Serial Number (ISSN)

  • 0169-4332

Digital Object Identifier (DOI)

  • 10.1016/S0169-4332(00)00455-4

Citation Source

  • Scopus