Reconstructed two-dimensional doping profiles from multiple one-dimensional secondary ion mass spectrometry measurements

Journal Article

Full Text

Duke Authors

Cited Authors

  • Goodwin-Johansson, SH

Published Date

  • January 1992

Published In

Volume / Issue

  • 10 / 1

Start / End Page

  • 369 - 369

Published By

International Standard Serial Number (ISSN)

  • 0734-211X

Digital Object Identifier (DOI)

  • 10.1116/1.586360