Full Text

• Published version (via Digital Object Identifier)
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Duke Authors

• Massoud, Hisham Z.

Cited Authors

• Conrad, KA

Published Date

• November 1993

Published In

• Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 

Volume / Issue

• 11 / 6

Start / End Page

• 2096 - 2096

Published By

• American Vacuum Society 

International Standard Serial Number (ISSN)

• 0734-211X

Digital Object Identifier (DOI)

• 10.1116/1.586548