Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques

Journal Article (Journal Article)

A new technique for the determination of twodimensional impurity profiles using methods developed for emission computed tomography is presented. Several one-dimensional impurity profiles obtained at different directions through the sample are used to reconstruct the twodimensional profile. A simulation study of the experiment is described, and the effects of various experimental and reconstruction parameters are discussed. Reconstructions of an area of 4 μm x 4 μm from thirteen one-dimensional measurements, with a resolution of 1000Å, are numerically possible. © 1989 IEEE

Full Text

Duke Authors

Cited Authors

  • Goodwin-Johansson, SH; Subrahmanyan, R; Floyd, CE; Massoud, HZ

Published Date

  • January 1, 1989

Published In

Volume / Issue

  • 8 / 4

Start / End Page

  • 323 - 335

Electronic International Standard Serial Number (EISSN)

  • 1937-4151

International Standard Serial Number (ISSN)

  • 0278-0070

Digital Object Identifier (DOI)

  • 10.1109/43.29587

Citation Source

  • Scopus