Design and construction of a rapid thermal processing system for in situ optical measurements
Publication
, Journal Article
Conrad, KA; Sampson, RK; Massoud, HZ; Irene, EA
Published in: Review of Scientific Instruments
January 1, 1996
A rapid thermal processing system is described incorporating features that enable in situ optical measurements. In particular, a system incorporating an in situ spectroscopic ellipsometer is described highlighting some of the unusual features necessary for ellipsometry measurements. These features include independent optical, vacuum, and heating modules, optical and heating window design, reflector design, and sample manipulation to enable proper positioning for measurement. Although specifically designed with ellipsometry in mind, many of the same principles used in the design of this system will apply to systems for other optical measurements. © 1996 American Institute of Physics.
Duke Scholars
Published In
Review of Scientific Instruments
DOI
ISSN
0034-6748
Publication Date
January 1, 1996
Volume
67
Issue
11
Start / End Page
3954 / 3957
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 34 Chemical sciences
- 09 Engineering
- 03 Chemical Sciences
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Conrad, K. A., Sampson, R. K., Massoud, H. Z., & Irene, E. A. (1996). Design and construction of a rapid thermal processing system for in situ optical measurements. Review of Scientific Instruments, 67(11), 3954–3957. https://doi.org/10.1063/1.1147273
Conrad, K. A., R. K. Sampson, H. Z. Massoud, and E. A. Irene. “Design and construction of a rapid thermal processing system for in situ optical measurements.” Review of Scientific Instruments 67, no. 11 (January 1, 1996): 3954–57. https://doi.org/10.1063/1.1147273.
Conrad KA, Sampson RK, Massoud HZ, Irene EA. Design and construction of a rapid thermal processing system for in situ optical measurements. Review of Scientific Instruments. 1996 Jan 1;67(11):3954–7.
Conrad, K. A., et al. “Design and construction of a rapid thermal processing system for in situ optical measurements.” Review of Scientific Instruments, vol. 67, no. 11, Jan. 1996, pp. 3954–57. Scopus, doi:10.1063/1.1147273.
Conrad KA, Sampson RK, Massoud HZ, Irene EA. Design and construction of a rapid thermal processing system for in situ optical measurements. Review of Scientific Instruments. 1996 Jan 1;67(11):3954–3957.
Published In
Review of Scientific Instruments
DOI
ISSN
0034-6748
Publication Date
January 1, 1996
Volume
67
Issue
11
Start / End Page
3954 / 3957
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 34 Chemical sciences
- 09 Engineering
- 03 Chemical Sciences
- 02 Physical Sciences