8 x 8 Array of Thin-Film Photodetectors Vertically Electrically Interconnected to Silicon Circuitry

Published

Journal Article

This paper reports the integration of an 8 x 8 array of thin-film GaAs-AlGaAs photodetectors onto a silicon-oscillator array circuit for massively parallel-image processing applications. Each detector was electrically connected to the oscillator below it using vertical electrical interconnections. Both sides of the thin-film devices were metallized for electrical contact, which minimized the interconnection density on the silicon circuit, thereby maximizing the available signal processing area. The yield of this integrated array and associated circuit was 100%, with the majority of pixels demonstrating a dynamic range of 50 dB. © 1995 IEEE

Full Text

Duke Authors

Cited Authors

  • Fike, SM; Buchanan, B; Jokerst, NM; Brooke, MA; Morris, TG; DeWeerth, SP

Published Date

  • January 1, 1995

Published In

Volume / Issue

  • 7 / 10

Start / End Page

  • 1168 - 1170

Electronic International Standard Serial Number (EISSN)

  • 1941-0174

International Standard Serial Number (ISSN)

  • 1041-1135

Digital Object Identifier (DOI)

  • 10.1109/68.466579

Citation Source

  • Scopus